Turbo Pump Repair Kits

Turbo Vaccum offers a wide range of Repair kits, Specialty tools, and Repair guides for many of the turbo pumps used today, obsolete and new. This includes Balzer/Pfeiffer, Leybold, Varian, Edwards, and many more not listed below. Our repair kits are engineered to meet or exceed the specifications of the OEM, giving you the same quality components needed to repair the pumps yourself. Some repair kits are only available exclusively through Turbo Vacuum.
Tool Kits
Includes specialty tools.
Repair Kits
Includes bearings and seals, and if needed oil wick/felt washer oil.
Adixen / Alcatel

Part Number:
A80BK
Model:
ATP80
Description:
Bearing Kit
Price:
$998.00

Part Number:
A100BK
Model:
ATP100
Description:
Bearing Kit
Price:
$998.00

Part Number:
A150RK
Model:
ATP150
Description:
Repair Kit
Price:
$985.00

Part Number:
A400RK
Model:
ATP400
Description:
Repair Kit
Price:
$985.00

Part Number:
A900RK
Model:
ATE900
Description:
Repair Kit
Price:
$985.00

Part Number:
A5010RK
Model:
5010
Description:
Repair Kit
Price:
$745.00

Part Number:
A5011RK
Model:
5011
Description:
Repair Kit
Price:
$745.00

Part Number:
A5011TK
Model:
5011/5010
Description:
Tool Kit and Manual
Price:
$1,970.00

Part Number:
A5080RK
Model:
5080/5081
Description:
Repair Kit
Price:
$725.00

Part Number:
A5150RK
Model:
5150
Description:
Repair Kit
Price:
$725.00

Part Number:
A5400BK
Model:
5400
Description:
Bearing Kit
Price:
$685.00

Part Number:
A5400RK
Model:
5400 / 5401 / 5402
Description:
Repair Kit
Price:
$695.00

Part Number:
200027
Model:
ATP80/100/5081/5011/5100
Description:
Grease Syringe
Price:
$189.00

Part Number:
200028
Model:
5400/5150/5900
Description:
Grease Syringe
Price:
$189.00

Part Number:
200029
Model:
ATP150/400/900
Description:
Grease Syringe
Price:
$189.00

Part Number:
A1300MRK
Model:
ATH1300M
Description:
Repair Kit
Price:
$1,840.00

Part Number:
A1600MRK
Model:
ATH1600M
Description:
Repair Kit
Price:
$1,840.00

Part Number:
A2300MRK
Model:
ATH2300M
Description:
Repair Kit
Price:
$1,890.00

Part Number:
A2303MRK
Model:
ATH2303
Description:
Repair Kit
Price:
$1,890.00

Pfeiffer

Part Number:
B022RK
Model:
TPD022
Description:
Repair Kit
Price:
$575.00

Part Number:
B050RK
Model:
TPH/U 050
Description:
Repair Kit
Price:
$785.00

Part Number:
B060RK
Model:
TPH/U 060
Description:
Repair Kit
Price:
$785.00

Part Number:
B062RK
Model:
TPH/U 062
Description:
Repair Kit
Price:
$785.00

Part Number:
B064RK
Model:
TMH/U 064/065
Description:
Repair Kit
Price:
$785.00

Part Number:
B071RK
Model:
TMH/U 071
Description:
Repair Kit
Price:
$785.00

Part Number:
B110RK
Model:
TPH/U 110
Description:
Repair Kit
Price:
$785.00

Part Number:
B170CDM
Model:
TPH/U 170
Description:
CD Service Manual
Price:
$250.00

Part Number:
B170RK
Model:
TPH/U 170
Description:
Repair Kit
Price:
$785.00

Part Number:
B180RK
Model:
TPH/U 180
Description:
Repair Kit
Price:
$785.00

Part Number:
B190RK
Model:
TPH/U 190
Description:
Repair Kit
Price:
$785.00

Part Number:
B240RK
Model:
TPH/U 240
Description:
Repair Kit
Price:
$825.00

Part Number:
B260RK
Model:
TMH/U 260/261/262
Description:
Repair Kit
Price:
$825.00

Part Number:
B270RK
Model:
TPM/U 270
Description:
Repair Kit
Price:
$825.00

Part Number:
B330CDM
Model:
TPH/U 330/270
Description:
CD Service Manual
Price:
$250.00

Part Number:
B330RK
Model:
TPH/U 330
Description:
Repair Kit
Price:
$825.00

Part Number:
B510CDM
Model:
TPH/U 510
Description:
CD Service Manual
Price:
$250.00

Part Number:
B510RK
Model:
TPH/U 510
Description:
Repair Kit
Price:
$825.00

Part Number:
B521RK
Model:
TMH/U 520/521
Description:
Repair Kit
Price:
$825.00

Part Number:
HP80RK
Model:
HP80
Description:
Repair Kit
Price:
$785.00

Part Number:
HP300RK
Model:
HP300
Description:
Repair Kit
Price:
$895.00

Part Number:
N5709103
Model:
020-521
Description:
Button Cover Removal Tool
Price:
$115.00

Part Number:
OC103593A
Model:
020-071
Description:
Replacement Oil Cartridge
Price:
$98.00

Part Number:
OC33758
Model:
TOH/U 040 / 050
Description:
Felt Disk
Price:
$23.00

Part Number:
OC63265
Model:
180-521
Description:
Replacement Oil Cartridge
Price:
$98.00

Part Number:
OR143451
Model:
HP300
Description:
Oil Reservoir
Price:
$123.00

Part Number:
OR143452
Model:
HP400/700
Description:
Oil Reservoir
Price:
$123.00

Part Number:
OR143740
Model:
HP80
Description:
Oil Reservoir
Price:
$145.00

Part Number:
OW0021
Model:
TPH/U
Description:
1 Meter Oil Wick 050-170/330
Price:
$35.00

Part Number:
6033AT
Model:
TPH/U 050-330
Description:
1 Liter TL Oil
Price:
$225.00

Part Number:
6034AT
Model:
TPH/U 050-330
Description:
250ml TL Oil
Price:
$105.00

Agilent / Varian

Part Number:
V60CDM
Model:
V60
Description:
CD Service Manual
Price:
$200.00

Part Number:
V60RK
Model:
V60
Description:
Repair Kit
Price:
$745.00

Part Number:
V70CDM
Model:
V70
Description:
CD Service Manual
Price:
$250.00

Part Number:
V70RK
Model:
V70
Description:
Repair Kit
Price:
$745.00

Part Number:
V81RK
Model:
V81
Description:
Repair Kit
Price:
$785.00

Part Number:
V200ARK
Model:
V200
Description:
Repair Kit
Price:
$810.00

Part Number:
V250CDM
Model:
V250/V300
Description:
CD Service Manual
Price:
$250.00

Part Number:
V250RK
Model:
V250
Description:
Repair Kit
Price:
$745.00

Part Number:
V300RK
Model:
V300
Description:
Repair Kit
Price:
$745.00

Part Number:
V301RK
Model:
V301
Description:
Repair Kit
Price:
$745.00

Part Number:
V401RK
Model:
V401
Description:
Repair Kit
Price:
$825.00

Part Number:
V550RK
Model:
V550
Description:
Repair Kit
Price:
$985.00

Part Number:
V551RK
Model:
V551
Description:
Repair Kit
Price:
$985.00

Part Number:
V701RK
Model:
V701
Description:
Repair Kit
Price:
$985.00

Part Number:
VTS300RK
Model:
TS300
Description:
Major Repair Kit
Price:
$785.00

Part Number:
VTS600RK
Model:
TS600
Description:
Major Repair Kit
Price:
$845.00

Part Number:
VTS300TS
Model:
TS300
Description:
Tip Seal Kit
Price:
$264.00

Part Number:
VTS600TS
Model:
TS600
Description:
Tip Seal Kit
Price:
$274.00

Part Number:
SH110TS
Model:
SH110
Description:
Tip Seal Kit
Price:
$289.00

Part Number:
IDP2TS
Model:
IDP2TS
Description:
Tip Seal Kit
Price:
$298.00

Part Number:
IDP3TS
Model:
IDP3TS
Description:
Tip Seal Kit
Price:
$298.00

Part Number:
V1001RK
Model:
V1001
Description:
Repair Kit
Price:
$998.00

Leybold

Part Number:
L150CDM
Model:
TMP150/151
Description:
CD Service Manual
Price:
$250.00

Part Number:
L150RK
Model:
TMP150/151
Description:
Repair Kit
Price:
$850.00

Part Number:
L360CDM
Model:
TMP360/361
Description:
CD Service Manual
Price:
$250.00

Part Number:
L360RK
Model:
TMP360/361
Description:
Repair Kit
Price:
$850.00

Part Number:
L340MRK
Model:
TMP340M
Description:
Repair Kit
Price:
$1985.00

Part Number:
L450CDM
Model:
TMP450
Description:
CD Service Manual
Price:
$250.00

Part Number:
L450RK
Model:
TMP450
Description:
Repair Kit
Price:
$850.00

Part Number:
L600RK
Model:
TMP600
Description:
Repair Kit
Price:
$850.00

Part Number:
TO500
Model:
TMP
Description:
Turbo Oil 500 c.c.
Price:
$260.00

Part Number:
L701RK
Model:
TW700/701
Description:
Repair Kit
Price:
$1,185.00

Part Number:
L1000RK
Model:
TMP1000
Description:
Repair Kit (Bearing not Greased)
Price:
$925.00

Part Number:
TW290SK
Model:
TW290
Description:
Seal Kit
Price:
$185.00

Part Number:
TW400SK
Model:
TW 400
Description:
Seal Kit
Price:
$185.00

Edwards

Part Number:
E70RK
Model:
EXT70
Description:
Repair Kit
Price:
$780.00

Part Number:
E250RK
Model:
EXT250
Description:
Repair Kit
Price:
$785.00

Part Number:
E255RK
Model:
EXT255
Description:
Repair Kit
Price:
$785.00

Part Number:
EXDS5TS
Model:
XDS5
Description:
Tips Seal Kit
Price:
$276.00

Part Number:
EXDS10TS
Model:
XDS10
Description:
Tips Seal Kit
Price:
$276.00

Part Number:
EXDS35TS
Model:
XDS35
Description:
Tips Seal Kit
Price:
$510.00

Part Number:
TPE008
Model:
EXT250/255
Description:
10PK Felt Disk
Price:
$98.00

Part Number:
TPE0007
Model:
EXT250/255
Description:
Lubricating Wick
Price:
$48.00

Part Number:
E500BK
Model:
EXT500
Description:
Bearing Kit
Price:
$785.00

Part Number:
STP300RK
Model:
STP300C/300H/400
Description:
Repair Kit
Price:
$780.00

Part Number:
STP301RK
Model:
STP301C/451
Description:
Repair Kit
Price:
$780.00

Part Number:
STPH301RK
Model:
STPH301/H451
Description:
Repair Kit
Price:
$800.00

Part Number:
STPH300RK
Model:
STPH300/H200
Description:
Repair Kit
Price:
$1,140.00

Part Number:
STP600RK
Model:
STP600/H600C
Description:
Repair Kit
Price:
$1,140.00

Part Number:
STP1000RK
Model:
STP1000/H1000C
Description:
Repair Kit
Price:
$1,140.00

Part Number:
STPH2000RK
Model:
STPH2000C
Description:
Repair Kit
Price:
$1,860.00

Part Number:
STP603RK
Model:
STP603/C
Description:
Repair Kit
Price:
$1,480.00

Part Number:
STP1003RK
Model:
STP1003/C
Description:
Repair Kit
Price:
$1,480.00

Part Number:
STPH803RK
Model:
STPH803/H1303
Description:
Repair Kit
Price:
$1,480.00

Part Number:
STPA803RK
Model:
STPA803C
Description:
Repair Kit
Price:
$1,480.00

Part Number:
STPA1303RK
Model:
STPA1303C
Description:
Repair Kit
Price:
$1,480.00

Part Number:
STP1603RK
Model:
STPA1603C
Description:
Repair Kit
Price:
$1,480.00

Part Number:
STPH1301RK
Model:
STPH1301
Description:
Repair Kit
Price:
$1,480.00

Part Number:
STPH2001RK
Model:
STPH2001C
Description:
Repair Kit
Price:
$1,860.00

Part Number:
STPA2203RK
Model:
STPA2203C
Description:
Repair Kit
Price:
$1,980.00

Part Number:
STPA2503RK
Model:
STPA2503C
Description:
Repair Kit
Price:
$1,980.00

Part Number:
STPXA2703RK
Model:
STPXA2703
Description:
Repair Kit
Price:
$1,980.00

Part Number:
STPA2803RK
Model:
STPA2803C
Description:
Repair Kit
Price:
$1,980.00

Part Number:
STPA3003RK
Model:
STPA3003C
Description:
Repair Kit
Price:
$1,980.00

Part Number:
STPA3503RK
Model:
STPA3503C
Description:
Repair Kit
Price:
$1,980.00

Part Number:
SCU300BAT
Model:
SCU
Description:
Replacement Battery
Price:
$124.00

Part Number:
SCU1000BAT
Model:
SCU
Description:
Replacement Battery
Price:
$241.00

Osaka

Part Number:
NTLG-1
Model:
TF160
Description:
Grease Syringe (10 PK)
Price:
$245.00

Part Number:
OSAK-OIL
Model:
N/A
Description:
1Kilo
Price:
$285.00

Part Number:
NTLF-260
Model:
TG / TF
Description:
260 ML Turbo Oil
Price:
$245.00

Part Number:
NTL-GN
Model:
TG 50/55/56, TF 62
Description:
Grease Lubricator (10 pc)
Price:
$285.00

Ebara

Part Number:
ET 600 BK
Model:
ET 600 WS
Description:
Bearing Kit
Price:
$1,450.00

Part Number:
ET 1600 BK
Model:
ET 1600 WS
Description:
Bearing Kit
Price:
$1,450.00

Kyky

Part Number:
KF620BK
Model:
F620
Description:
Bearing Kit
Price:
$1,420.00