Mass Spectrometer

Turbo Vacuum realizes that Mass Spectrometric measuring methods have become an indispensable diagnostic aid in numerous branches of process engineering, technology and product development, medicine, and basic scientific research. A vacuum must be generated for operating mass spectrometers. Conversely, development of vacuum technologies has increasingly required the utilization of small, high-performance mass spectrometers. Mass Spectrometers require a working pressure of 1 x 5-5 mbar. Since many processes operate at higher pressures, the mass spec cannot be solely selected based on analyzer, ion source and detector. A coordinated system consists of mass spec, vacuum pump, and measurement tool.
Applications
• Leak testing of serial production components
• Quantitative determination of composition and purity of process gases
• Complex analysis of catalytic reactions on the surface of solid bodies
• Investigation of biochemical substance transformations
The Prisma Series for residual gas analysis, leak detections and process – monitoring in the high vacuum range.
Features
• Economical
• Easy System Integration
• Fast and Error-Free Data Transfer Via Fiber Optics
• User Friendly Software
• Selectable Partial Pressures
• High Up-Time Due To Dual Filmier Design
srs-100-mass-spec

RGA 100

Technical Specifications

Mass Range (amu):
1 – 100
ECU Dimension:
9.1″x4.1″x3.1″
Detection Limit, MIN (mbar):
5×10-11
Sensitifity For AR (a/mbar):
2.10-4
Dectector:
Faraday
Operating Pressure Max (mbar):
1×10-4
Resolution:
> 0.5 AMU @ 10% Peak
Operating Temperature/Analyzer (OC Max):
70
Connecting Flange:
CF 40
Weight (lbs):
6

Ordering Information

Part Number
RGA100PM

Adaptor
DN40CF – F

srs-200-mass-spec

RGA 200

Technical Specifications

Mass Range (amu):
1 – 200
ECU Dimension:
9.1″x4.1″x3.1″
Detection Limit, MIN (mbar):
5×10-11
Sensitifity For AR (a/mbar):
2.10-4
Dectector:
Faraday
Operating Pressure Max (mbar):
1×10-4
Resolution:
> 0.5 AMU @ 10% Peak
Operating Temperature/Analyzer (OC Max):
70
Connecting Flange:
CF 40
Weight (lbs):
6

Ordering Information

Part Number
RGA200PM

Adaptor
DN40CF – F

srs-300-mass-spec

RGA 300

Technical Specifications

Mass Range (amu):
1 – 300
ECU Dimension:
9.1″x4.1″x3.1″
Detection Limit, MIN (mbar):
5×10-11
Sensitifity For AR (a/mbar):
2.10-4
Dectector:
Faraday
Operating Pressure Max (mbar):
1×10-4
Resolution:
> 0.5 AMU @ 10% Peak
Operating Temperature/Analyzer (OC Max):
70
Connecting Flange:
CF 40
Weight (lbs):
6

Ordering Information

Part Number
RGA300PM

Adaptor
DN40CF – F

prisma-pro

PRISMA PRO 100

Technical Specifications

Mass Range (amu):
1 – 100
System Diameter / Length (mm):
6 / 100
Detection Limit, MIN (mbar):
4.10-13
Sensitifity For AR (a/mbar):
5.10-4
Dectector:
Faraday
Operating Pressure Max (mbar):
5.10-4
Contribution to Neighboring Mass (40/41) PPM:
< 10
Operating Temperature/Analyzer (OC Max):
200
Connecting Flange:
CF 40
Weight (lbs):
5.5

Ordering Information

Part Number
2000007313

Adaptor
DN40CF – F

prisma-pro

PRISMA PRO 200

Technical Specifications

Mass Range (amu):
1 – 200
System Diameter / Length (mm):
6 / 100
Detection Limit, MIN (mbar):
5.10-13
Sensitifity For AR (a/mbar):
4.10-4
Dectector:
Faraday
Operating Pressure Max (mbar):
5.10-13
Contribution to Neighboring Mass (40/41) PPM:
< 20
Operating Temperature/Analyzer (OC Max):
200
Connecting Flange:
CF 40
Weight (lbs):
5.5

Ordering Information

Part Number
2000007318

Adaptor
DN40CF – F

prisma-pro

PRISMA PRO 300

Technical Specifications

Mass Range (amu):
1 – 300
System Diameter / Length (mm):
6 / 100
Detection Limit, MIN (mbar):
7.10-13
Sensitifity For AR (a/mbar):
3.10-4
Dectector:
Faraday
Operating Pressure Max (mbar):
5.10-4
Contribution to Neighboring Mass (40/41) PPM:
< 50
Operating Temperature/Analyzer (OC Max):
200
Connecting Flange:
CF 40
Weight (lbs):
5.5

Ordering Information

Part Number
2000007322

Adaptor
DN40CF – F