KYKY Magnetically Levitated

The CFX series magnetically levitated turbo pumps rely on magnetic bearings to support the shafting system can meet the application requirements of semiconductor manufacturing, chip manufacturing, industrial coating, scientific research. This series is available for pumping speed of 1400 to 3000 l/s and ultimate base pressures of 20 Pa to 10-7 Pa. The integrated controller continuously monitors and automatically adjust the rotor position to achieve wear-free and low vibration functions. Temperature management system available.

Features
• Economical
• Integrated controller
• Diverse Communication
• Simplistic design. Reliable
• One-click rest function
• High gas throughput and high pumping speed mountable any position

CXF 200 – 140 1

Technical Specifications

Inlet Flange:
ISO 200, CF 200
Pumping Speed, L/S (N):
1400
Pumping Speed, L/S (AR):
1360
Pumping Speed, L/S (HE):
880
Pumping Speed, L/S (H):
560
Compression Ratio (N):
> 10/7
Compression Ratio (AR):
10/7
Compression Ratio (H):
10/4
Compression Ratio (H2):
10/3
Ultimate Pressure (mbar):
10-6
Startup Time (min):
6
Rotational Speed (rpm):
30,000
Orientation:
Any
Backing Pressure (mbar):
0.1
Outlet Flange:
KF 40
Weight (lb):
112
Controller:
Integrated
Complete System Price:
$15,128.00

Ordering Information

Turbo Pump Systems ISO
Air Cooling: N/A
Water Cooling: CXF1401-ISO

Turbo Pump Systems CF
Air Cooling: N/A
Water Cooling: CXF1401-CF

CXF 250 – 230 1

Technical Specifications

Inlet Flange:
ISO 250, CF 250
Pumping Speed, L/S (N):
2300
Pumping Speed, L/S (AR):
2250
Pumping Speed, L/S (HE):
1900
Pumping Speed, L/S (H):
850
Compression Ratio (N):
> 10/7
Compression Ratio (AR):
10/7
Compression Ratio (H):
10/4
Compression Ratio (H2):
10/3
Ultimate Pressure (mbar):
10-7
Startup Time (min):
8
Rotational Speed (rpm):
27,000
Orientation:
Any
Backing Pressure (mbar):
0.1
Outlet Flange:
KF 40
Weight (lb):
128
Controller:
Integrated
Complete System Price:
$16,375.00

Ordering Information

Turbo Pump Systems ISO
Air Cooling: N/A
Water Cooling: CXF2301-ISO

Turbo Pump Systems CF
Air Cooling: N/A
Water Cooling: CXF2301-CF

CXF 320 – 300 1

Technical Specifications

Inlet Flange:
ISO 250, CF 250
Pumping Speed, L/S (N):
3000
Pumping Speed, L/S (AR):
2750
Pumping Speed, L/S (HE):
2300
Pumping Speed, L/S (H):
1100
Compression Ratio (N):
> 10/7
Compression Ratio (AR):
10/7
Compression Ratio (H):
10/4
Compression Ratio (H2):
10/3
Ultimate Pressure (mbar):
10-7
Startup Time (min):
12
Rotational Speed (rpm):
21,000
Orientation:
Any
Backing Pressure (mbar):
0.1
Outlet Flange:
KF 40
Weight (lb):
165
Controller:
Integrated
Complete System Price:
$19,250.00

Ordering Information

Turbo Pump Systems ISO
Air Cooling: N/A
Water Cooling: CXF3001-ISO

Turbo Pump Systems CF
Air Cooling: N/A
Water Cooling: CXF3001-CF