Edwards Magnetically Levitated Turbo Pumps With Stand Alone Controller
The first STP magnetically levitated turbo pumps were sold in 1983 worldwide. Today the STP turbo pumps account for 85% of the semiconductor and process tool market. They demonstrate exceptional levels of reliability, class leading performance, and low cost of ownership on the harshest applications. The STP pumps are the first choice for applications demanding high up–time, hydrocarbon-free pumping, minimal maintenance, and low vibration. The use of magnetically levitated bearings eliminates the risk of contamination, while ensuring the units resist rapid changes in gas throughput and mechanical shock.
Features
• Proven reliability
• Clean, oil-free vacuum
• Complete range 300 L/S – 3000 L/S
• 5 axis auto tuning
• Installation in any orientation
• Full remote control interface
• Includes inlet screen and water cooling
• Low noise and vibration
• Virtually maintenance free
• Corrosive version available (C/CV models)
SCU-801 & SCU-1601 Turbo Pump Controllers
The fully-digital SCU-801 and SCU-1601 turbo pump control units are compatible with STP turbo pumps, ranging from 300 l/s to over 2000 l/s. New Vibration Reduction System (VRS) technology reduces vibration levels, and the advanced maintenance warning functions enable intelligent maintenance scheduling. Simplified network connectivity to EdCentra without the need for additional hardware enables equipment monitoring & data analytics.
The SCU-801 and SCU-1601 provides reliability, enhanced communication and pump compatibility with reduced back-up unit requirements and minimized overall cost of ownership.
Features
• Service port in front panel
• Two-stage warning messages
• Rotor imbalance monitoring
• Back-up bearing damage monitoring
• Self-diagnostic functions
Communication options
• I/O remote
• RS232/485
• LonWorks (option)
• PROFIBUS (option)
• EtherCAT (option)
Low vibration
• Vibration Reduction System (VRS)
• Auto Balancing System (ABS)
STP603/C
Technical Specifications
Inlet Flange:
ISO 160, CF 160
Pumping Speed, L/S (N):
650
Pumping Speed, L/S (He):
N/A
Pumping Speed, L/S (H):
550
Compression Ratio (N):
10/8
Compression Ratio (He):
N/A
Compression Ratio (H):
10/5
Ultimate Pressure (mbar):
10-10
Startup Time (min):
3
Rotational Speed (rpm):
35,000
Orientation:
Any
Backing Pressure (mbar):
0.1
Outlet Flange:
NW 40
Weight (lb):
69
Controller:
SCU-801
Ordering Information
Turbo Pump
ISO Inlet: YT 39B0030
CF Inlet: YT 3902005
ISO Inlet: N/A
CF Inlet: N/A
Controller
YT9520200
STPA803C/CV
Technical Specifications
Inlet Flange:
ISO 160, CF 160
Pumping Speed, L/S (N):
800
Pumping Speed, L/S (He):
N/A
Pumping Speed, L/S (H):
520
Compression Ratio (N):
10/8
Compression Ratio (He):
N/A
Compression Ratio (H):
10/3
Ultimate Pressure (mbar):
10-9
Startup Time (min):
7
Rotational Speed (rpm):
32,500
Orientation:
Any
Backing Pressure (mbar):
0.1
Outlet Flange:
NW 40
Weight (lb):
86
Controller:
SCU-801
Ordering Information
Turbo Pump
ISO Inlet: YT 36B0040
CF Inlet: YT 36B0010
ISO Inlet: N/A
CF Inlet: N/A
Controller
YT9520200
STP1003/C
Technical Specifications
Inlet Flange:
ISO 200, CF 200
Pumping Speed, L/S (N):
1000
Pumping Speed, L/S (He):
N/A
Pumping Speed, L/S (H):
300
Compression Ratio (N):
10/8
Compression Ratio (He):
N/A
Compression Ratio (H):
10/5
Ultimate Pressure (mbar):
10-4
Startup Time (min):
6
Rotational Speed (rpm):
35,000
Orientation:
Any
Backing Pressure (mbar):
0.1
Outlet Flange:
NW 40
Weight (lb):
68
Controller:
SCU-801
Ordering Information
Turbo Pump
ISO Inlet: YT 39B2001
CF Inlet: YT 39B0010
ISO Inlet: N/A
CF Inlet: N/A
Controller
YT9520200
STPA1303C/CV
Technical Specifications
Inlet Flange:
ISO 200, CF 200
Pumping Speed, L/S (N):
1300
Pumping Speed, L/S (He):
N/A
Pumping Speed, L/S (H):
800
Compression Ratio (N):
10/8
Compression Ratio (He):
N/A
Compression Ratio (H):
10/3
Ultimate Pressure (mbar):
10-9
Startup Time (min):
7
Rotational Speed (rpm):
32,500
Orientation:
Any
Backing Pressure (mbar):
0.1
Outlet Flange:
NW 40
Weight (lb):
86
Controller:
SCU-801
Ordering Information
Turbo Pump
ISO Inlet: YT 36B0120
CF Inlet: YT 36B0030
ISO Inlet: N/A
CF Inlet: N/A
Controller
YT9520200
STPA1603C/CV
Technical Specifications
Inlet Flange:
ISO 200, CF 200
Pumping Speed, L/S (N):
1600
Pumping Speed, L/S (He):
N/A
Pumping Speed, L/S (H):
1200
Compression Ratio (N):
10/8
Compression Ratio (He):
N/A
Compression Ratio (H):
10/3
Ultimate Pressure (mbar):
10-9
Startup Time (min):
7
Rotational Speed (rpm):
36,500
Orientation:
Any
Backing Pressure (mbar):
2
Outlet Flange:
NW 40
Weight (lb):
77
Controller:
SCU-801
Ordering Information
Turbo Pump
ISO Inlet: YT 46B0030
CF Inlet: YT 46B0010
ISO Inlet: N/A
CF Inlet: N/A
Controller
YT9520200
STPA2203C/CV
Technical Specifications
Inlet Flange:
ISO 250, CF 250
Pumping Speed, L/S (N):
2200
Pumping Speed, L/S (He):
N/A
Pumping Speed, L/S (H):
1700
Compression Ratio (N):
10/8
Compression Ratio (He):
N/A
Compression Ratio (H):
10/4
Ultimate Pressure (mbar):
10-9
Startup Time (min):
7
Rotational Speed (rpm):
27,000
Orientation:
Any
Backing Pressure (mbar):
0.1
Outlet Flange:
NW 40
Weight (lb):
134
Controller:
SCU-1601
Ordering Information
Turbo Pump
ISO Inlet: YT 46B0030
CF Inlet: YT 46B0010
ISO Inlet: N/A
CF Inlet: N/A
Controller
YT9620200
STPXA2703C
Technical Specifications
Inlet Flange:
ISO 250, CF 250
Pumping Speed, L/S (N):
2650
Pumping Speed, L/S (He):
N/A
Pumping Speed, L/S (H):
2050
Compression Ratio (N):
10/8
Compression Ratio (He):
N/A
Compression Ratio (H):
6 x 10/3
Ultimate Pressure (mbar):
10-7
Startup Time (min):
8
Rotational Speed (rpm):
27,500
Orientation:
Any
Backing Pressure (mbar):
2
Outlet Flange:
NW 40
Weight (lb):
165
Controller:
SCU-1601
Ordering Information
Turbo Pump
ISO Inlet: PT 6602140
CF Inlet: YT 6610010
STPXA3203C
Technical Specifications
Inlet Flange:
ISO 320, CF 320
Pumping Speed, L/S (N):
3200
Pumping Speed, L/S (He):
N/A
Pumping Speed, L/S (H):
2300
Compression Ratio (N):
10/8
Compression Ratio (He):
N/A
Compression Ratio (H):
6 x 10/3
Ultimate Pressure (mbar):
10-7
Startup Time (min):
8
Rotational Speed (rpm):
27,500
Orientation:
Any
Backing Pressure (mbar):
2
Outlet Flange:
NW 40
Weight (lb):
176
Controller:
SCU-1601
Ordering Information
Turbo Pump
ISO Inlet: YT 6602050
CF Inlet: PT 6602080
STPXA4503C/CV
Technical Specifications
Inlet Flange:
ISO 320
Pumping Speed, L/S (N):
4300
Pumping Speed, L/S (He):
N/A
Pumping Speed, L/S (H):
2500
Compression Ratio (N):
10/8
Compression Ratio (He):
N/A
Compression Ratio (H):
6 x 10/3
Ultimate Pressure (mbar):
10-9
Startup Time (min):
12
Rotational Speed (rpm):
24,000
Orientation:
Any
Backing Pressure (mbar):
2
Outlet Flange:
NW 40
Weight (lb):
184
Controller:
SCU-1601
Ordering Information
Turbo Pump
ISO Inlet: YT 6702040