Edwards Magnetically Levitated Turbo Pumps
The first STP magnetically levitated turbo pumps were sold in 1983 worldwide. Today the STP turbo pumps account for 85% of the semiconductor and process tool market with 166,000 units sold. They demonstrate exceptional levels of reliability, class leading performance, and low cost of ownership on the harshest applications. The STP pumps are the first choice for applications demanding high up–time, hydrocarbon-free pumping, minimal maintenance, and low vibration. The use of magnetically levitated bearings eliminates the risk of contamination, while ensuring the units resist rapid changes in gas throughput and mechanical shock. Newer styles are designed with integrated controller and power supply.
Features
• Proven reliability
• Clean, oil-free vacuum
• Complete range 300 L/S – 3000 L/S
• 5 axis auto tuning
• Installation in any orientation
• Full remote control interface
• Includes inlet screen and water cooling
• Low noise and vibration
• Virtually maintenance free
• Corrosive version available (C/CV models)
• Units with integrated controller power supply
SCU Turbo Pump Controller
The SCU turbo pump control unit is a fully digital controller, and has perfect compatibility with the magnetically levitated turbo pumps. The new AVR (Auto Vibration Reduction) technology achieves a further reduction in vibration levels, and the advanced pre-maintenance call function provides advanced notice of precise maintenance time.
Features
• Universal Controller
• Rotor Imbalance Monitoring
• Back-Up Bearing Monitoring
• Highest Reliability
• Communication Ports
STP301/C
Technical Specifications
Inlet Flange:
ISO 100, CF 100
Pumping Speed, L/S (N):
300
Pumping Speed, L/S (He):
N/A
Pumping Speed, L/S (H):
300
Compression Ratio (N):
10/8
Compression Ratio (He):
N/A
Compression Ratio (H):
2 x 10/4
Ultimate Pressure (mbar):
10-10
Startup Time (min):
3
Rotational Speed (rpm):
48,000
Orientation:
Any
Backing Pressure (mbar):
0.1
Outlet Flange:
NW 25
Weight (lb):
24
Price:
$14,565.00
Controller:
SCU-350
Controller Price:
$8,011.00
Ordering Information
Turbo Pump
ISO Inlet: B748-30-020
CF Inlet: B748-31-010
ISO Inlet: N/A
CF Inlet: N/A
Controller
YT21ZE220
STP451/C
Technical Specifications
Inlet Flange:
ISO 160, CF 160
Pumping Speed, L/S (N):
440
Pumping Speed, L/S (He):
420
Pumping Speed, L/S (H):
275
Compression Ratio (N):
10/8
Compression Ratio (He):
5 x 10/5
Compression Ratio (H):
2 x 10/4
Ultimate Pressure (mbar):
10-10
Startup Time (min):
6
Rotational Speed (rpm):
48,000
Orientation:
Any
Backing Pressure (mbar):
0.1
Outlet Flange:
NW 25
Weight (lb):
53
Price:
$16,640.00
Controller:
SCU-350
Controller Price:
$8,011.00
Ordering Information
Turbo Pump
ISO Inlet: B748-40-030
CF Inlet: B748-41-010
ISO Inlet: N/A
CF Inlet: N/A
Controller
YT21ZE220
STP603/C
Technical Specifications
Inlet Flange:
ISO 160, CF 160
Pumping Speed, L/S (N):
650
Pumping Speed, L/S (He):
N/A
Pumping Speed, L/S (H):
550
Compression Ratio (N):
10/8
Compression Ratio (He):
N/A
Compression Ratio (H):
10/5
Ultimate Pressure (mbar):
10-10
Startup Time (min):
3
Rotational Speed (rpm):
35,000
Orientation:
Any
Backing Pressure (mbar):
0.1
Outlet Flange:
NW 40
Weight (lb):
69
Price:
$17,680.00
Controller:
SCU-800
Controller Price:
$9,259.00
Ordering Information
Turbo Pump
ISO Inlet: YT 39B0030
CF Inlet: YT 3902005
ISO Inlet: N/A
CF Inlet: N/A
Controller
YT49Z2200
STPA803C/CV
Technical Specifications
Inlet Flange:
ISO 160, CF 160
Pumping Speed, L/S (N):
800
Pumping Speed, L/S (He):
N/A
Pumping Speed, L/S (H):
520
Compression Ratio (N):
10/8
Compression Ratio (He):
N/A
Compression Ratio (H):
10/3
Ultimate Pressure (mbar):
10-9
Startup Time (min):
7
Rotational Speed (rpm):
32,500
Orientation:
Any
Backing Pressure (mbar):
0.1
Outlet Flange:
NW 40
Weight (lb):
86
Price:
$23,920.00
Controller:
SCU-800
Controller Price:
$9,259.00
Ordering Information
Turbo Pump
ISO Inlet: YT 36B0040
CF Inlet: YT 36B0010
ISO Inlet: N/A
CF Inlet: N/A
Controller
YT49Z2200
STP1003/C
Technical Specifications
Inlet Flange:
ISO 200, CF 200
Pumping Speed, L/S (N):
1000
Pumping Speed, L/S (He):
N/A
Pumping Speed, L/S (H):
300
Compression Ratio (N):
10/8
Compression Ratio (He):
N/A
Compression Ratio (H):
10/5
Ultimate Pressure (mbar):
10-4
Startup Time (min):
6
Rotational Speed (rpm):
35,000
Orientation:
Any
Backing Pressure (mbar):
0.1
Outlet Flange:
NW 40
Weight (lb):
68
Price:
$21,848.00
Controller:
SCU-800
Controller Price:
$9,259.00
Ordering Information
Turbo Pump
ISO Inlet: YT 39B2001
CF Inlet: YT 39B0010
ISO Inlet: N/A
CF Inlet: N/A
Controller
YT49Z2200
STPA1303C/CV
Technical Specifications
Inlet Flange:
ISO 200, CF 200
Pumping Speed, L/S (N):
1300
Pumping Speed, L/S (He):
N/A
Pumping Speed, L/S (H):
800
Compression Ratio (N):
10/8
Compression Ratio (He):
N/A
Compression Ratio (H):
10/3
Ultimate Pressure (mbar):
10-9
Startup Time (min):
7
Rotational Speed (rpm):
32,500
Orientation:
Any
Backing Pressure (mbar):
0.1
Outlet Flange:
NW 40
Weight (lb):
86
Price:
$28,090.00
Controller:
SCU-800
Controller Price:
$9,259.00
Ordering Information
Turbo Pump
ISO Inlet: YT 36B0120
CF Inlet: YT 36B0030
ISO Inlet: N/A
CF Inlet: N/A
Controller
YT49Z2200
STPA1603C/CV
Technical Specifications
Inlet Flange:
ISO 200, CF 200
Pumping Speed, L/S (N):
1600
Pumping Speed, L/S (He):
N/A
Pumping Speed, L/S (H):
1200
Compression Ratio (N):
10/8
Compression Ratio (He):
N/A
Compression Ratio (H):
10/3
Ultimate Pressure (mbar):
10-9
Startup Time (min):
7
Rotational Speed (rpm):
36,500
Orientation:
Any
Backing Pressure (mbar):
2
Outlet Flange:
NW 40
Weight (lb):
77
Price:
$31,620.00
Controller:
SCU-800
Controller Price:
$9,259.00
Ordering Information
Turbo Pump
ISO Inlet: YT 46B0030
CF Inlet: YT 46B0010
ISO Inlet: N/A
CF Inlet: N/A
Controller
YT49Z2200
STPA2203C/CV
Technical Specifications
Inlet Flange:
ISO 250, CF 250
Pumping Speed, L/S (N):
2200
Pumping Speed, L/S (He):
N/A
Pumping Speed, L/S (H):
1700
Compression Ratio (N):
10/8
Compression Ratio (He):
N/A
Compression Ratio (H):
10/4
Ultimate Pressure (mbar):
10-9
Startup Time (min):
7
Rotational Speed (rpm):
27,000
Orientation:
Any
Backing Pressure (mbar):
0.1
Outlet Flange:
NW 40
Weight (lb):
134
Price:
$35,893.00
Controller:
SCU-1600
Controller Price:
$12,848.00
Ordering Information
Turbo Pump
ISO Inlet: YT 46B0030
CF Inlet: YT 46B0010
ISO Inlet: N/A
CF Inlet: N/A
Controller
YT49Z2200
STPXA2703C
Technical Specifications
Inlet Flange:
ISO 250, CF 250
Pumping Speed, L/S (N):
2650
Pumping Speed, L/S (He):
N/A
Pumping Speed, L/S (H):
2050
Compression Ratio (N):
10/8
Compression Ratio (He):
N/A
Compression Ratio (H):
6 x 10/3
Ultimate Pressure (mbar):
10-7
Startup Time (min):
8
Rotational Speed (rpm):
27,500
Orientation:
Any
Backing Pressure (mbar):
2
Outlet Flange:
NW 40
Weight (lb):
165
Price:
$46,992.00
Controller:
SCU-1600
Controller Price:
$12,848.00
Ordering Information
Turbo Pump
ISO Inlet: PT 6602140
CF Inlet: YT 6610010
STPXA3203C
Technical Specifications
Inlet Flange:
ISO 320, CF 320
Pumping Speed, L/S (N):
3200
Pumping Speed, L/S (He):
N/A
Pumping Speed, L/S (H):
2300
Compression Ratio (N):
10/8
Compression Ratio (He):
N/A
Compression Ratio (H):
6 x 10/3
Ultimate Pressure (mbar):
10-7
Startup Time (min):
8
Rotational Speed (rpm):
27,500
Orientation:
Any
Backing Pressure (mbar):
2
Outlet Flange:
NW 40
Weight (lb):
176
Price:
$52,272.00
Controller:
SCU-1600
Controller Price:
$12,848.00
Ordering Information
Turbo Pump
ISO Inlet: YT 6602050
CF Inlet: PT 6602080
STPXA4503C/CV
Technical Specifications
Inlet Flange:
ISO 320
Pumping Speed, L/S (N):
4300
Pumping Speed, L/S (He):
N/A
Pumping Speed, L/S (H):
2500
Compression Ratio (N):
10/8
Compression Ratio (He):
N/A
Compression Ratio (H):
6 x 10/3
Ultimate Pressure (mbar):
10-9
Startup Time (min):
12
Rotational Speed (rpm):
24,000
Orientation:
Any
Backing Pressure (mbar):
2
Outlet Flange:
NW 40
Weight (lb):
184
Price:
$58,650.00
Controller:
SCU-1600
Controller Price:
$12,848.00
Ordering Information
Turbo Pump
ISO Inlet: YT 6702040
STPIS1607/C
Technical Specifications
Inlet Flange:
ISO 250, CF 200
Pumping Speed, L/S (N):
1600
Pumping Speed, L/S (AR):
1000
Pumping Speed, L/S (H):
300
Compression Ratio (N):
10/8
Compression Ratio (He):
N/A
Compression Ratio (H):
10/2
Ultimate Pressure (mbar):
10-9
Startup Time (min):
8
Rotational Speed (rpm):
36,500
Orientation:
Any
Backing Pressure (mbar):
3.3
Outlet Flange:
NW 40
Weight (lb):
104
Price:
$33,280.00
Controller:
Integrated
Controller Price:
N/A
Ordering Information
Turbo Pump
ISO Inlet: YT 940Z010
ISO Inlet: YT 940Z020
ISO Inlet: YT 940Z030
CF Inlet: YT 940Z050
Controller
Integrated
STPIS2207/C
Technical Specifications
Inlet Flange:
ISO 200, ISO 250, CF 200, CF 250
Pumping Speed, L/S (N):
2200
Pumping Speed, L/S (AR):
2000
Pumping Speed, L/S (H):
750
Compression Ratio (AR):
10/7
Compression Ratio (He):
N/A
Compression Ratio (H):
10/2
Ultimate Pressure (mbar):
10-8
Startup Time (min):
8
Rotational Speed (rpm):
36,500
Orientation:
Any
Backing Pressure (mbar):
1.5
Outlet Flange:
NW 40
Weight (lb):
100
Price:
$35,360.00
Controller:
Integrated
Controller Price:
N/A
Ordering Information
Turbo Pump
ISO Inlet: YT 850Z000
ISO Inlet: YT 890Z040
CF Inlet: YT 890Z020
Controller
Integrated
STPIXA2206C
Technical Specifications
Inlet Flange:
ISO 250, CF 250
Pumping Speed, L/S (N):
2200
Pumping Speed, L/S (He):
N/A
Pumping Speed, L/S (H):
1900
Compression Ratio (N):
10/8
Compression Ratio (He):
N/A
Compression Ratio (H):
10/4
Ultimate Pressure (mbar):
10-9
Startup Time (min):
8
Rotational Speed (rpm):
27,000
Orientation:
Any
Backing Pressure (mbar):
2
Outlet Flange:
NW 40
Weight (lb):
136
Price:
$41,616.00
Controller:
Integrated
Controller Price:
N/A
Ordering Information
Turbo Pump
ISO Inlet: Y 1810Z010
CF Inlet: Y 1810Z030
ISO Inlet: N/A
CF Inlet: N/A
Controller
Integrated
STPIXA3306C
Technical Specifications
Inlet Flange:
ISO 250, CF 250 , ISO 320, CF 320
Pumping Speed, L/S (N):
2650
Pumping Speed, L/S (He):
N/A
Pumping Speed, L/S (H):
2300
Compression Ratio (N):
10/8
Compression Ratio (He):
N/A
Compression Ratio (H):
10/3
Ultimate Pressure (mbar):
10-9
Startup Time (min):
10
Rotational Speed (rpm):
27,000
Orientation:
Any
Backing Pressure (mbar):
2
Outlet Flange:
NW 40
Weight (lb):
176
Price:
$52,000.00
Controller:
Integrated
Controller Price:
N/A
Ordering Information
Turbo Pump
ISO Inlet: YT 820Z020
CF Inlet: YT 820Z040
ISO Inlet: N/A
CF Inlet: N/A
Controller
Integrated
STPIXA4506C/CV
Technical Specifications
Inlet Flange:
ISO 320
Pumping Speed, L/S (N):
4000
Pumping Speed, L/S (He):
N/A
Pumping Speed, L/S (H):
2700
Compression Ratio (N):
10/8
Compression Ratio (He):
N/A
Compression Ratio (H):
10/3
Ultimate Pressure (mbar):
10-9
Startup Time (min):
11
Rotational Speed (rpm):
24,240
Orientation:
Any
Backing Pressure (mbar):
2
Outlet Flange:
NW 40
Weight (lb):
244
Price:
$70,055.00
Controller:
Integrated
Controller Price:
N/A
Ordering Information
Turbo Pump
ISO Inlet: YT 7802010
Controller
Integrated