Leybold Magnetically Levitated Turbo Pumps

The world-wide success of the TURBOVAC MAG product line results from more than 30 years of experience in development and manufacturing of turbo-molecular pumps with magnetically levitated rotors. In 1976 they introduced the 560M turbo. This was the first magnetically levitated turbo which became commercially available. Most of the MAG turbo pumps are designed with five axes active bearings. The rotor position is actively controlled by electromagnets in all five degrees of freedom. The MAG turbo pumps are designed for numerous applications including; semiconductor processes, CVD, PVD, ion implantation, electron beam microscopy, and areas where corrosive gases are evacuated. The MAG W 300iP/400iP/600iP, integrate a state-of-the-art converter with RS232/RS485 for bearing & drive system, eliminating the need for a convention bench-top controller solution and interconnecting cable.
Features
• 5 Axis magnetic bearing drive system
• Maintenance free systems
• High performance in any orientation
• High degree of operating reliability
• Extremely low vibration and noise
• Designed for pumping of corrosive gases
• Corrosive and Non-Corrosive Versions Available
Oerlikon-MAG-W-300iP-400iP

MAG W 300iP

Technical Specifications

Inlet Flange
ISO 100, CF 100
Pumping Speed, L/S (N):
300
Pumping Speed, L/S (He):
260
Pumping Speed, L/S (H):
190
Compression Ratio (N):
2 x 10/9
Compression Ratio (He):
3.2 x 10/3
Compression Ratio (H):
9.2 x 10/4
Ultimate Pressure (mbar):
10 – 10
Startup Time (min):

Rotational Speed (rpm):

Orientation:
Any
Backing Pressure (mbar):
8
Outlet Flange:
NW 16
Weight (lb):
26
Price:
$17,570.00
Controller:
Integrated

Ordering Information

Turbo Pump
ISO 100 – 410300V0505
ISO 160 – N/A
ISO 200 – N/A
ISO 250 – N/A
CF 100 – 410300V0506
CF 160 – N/A
CF 200 – N/A
CF 250 – N/A

Oerlikon-MAG-W-300iP-400iP

MAG W 400iP

Technical Specifications

Inlet Flange
ISO 160, CF 160
Pumping Speed, L/S (N):
365
Pumping Speed, L/S (He):
200
Pumping Speed, L/S (H):
290
Compression Ratio (N):
2 x 10/9
Compression Ratio (He):
3.2 x 10/3
Compression Ratio (H):
9.2 x 10/4
Ultimate Pressure (mbar):
10 – 10
Startup Time (min):

Rotational Speed (rpm):

Orientation:
Any
Backing Pressure (mbar):
8
Outlet Flange:
NW 16
Weight (lb):
26
Price:
$17,570.00
Controller:
Integrated

Ordering Information

Turbo Pump
ISO 100 – N/A
ISO 160 – 410400V0505
ISO 200 – N/A
ISO 250 – N/A
CF 100 – N/A
CF 160 – 410400V0506
CF 200 – N/A
CF 250 – N/A

Oerlikon-MAG-W-600iP

MAG W 600iP

Technical Specifications

Inlet Flange
ISO 160, CF 160
Pumping Speed, L/S (N):
550
Pumping Speed, L/S (He):
570
Pumping Speed, L/S (H):
410
Compression Ratio (N):
1 x 10/10
Compression Ratio (He):
3.4 x 10/4
Compression Ratio (H):
1.7 x 10/6
Ultimate Pressure (mbar):
10 – 8
Startup Time (min):
6
Rotational Speed (rpm):

Orientation:
Any
Backing Pressure (mbar):
6
Outlet Flange:
NW 25
Weight (lb):
37
Price:
$21,800.00
Controller:
Integrated

Ordering Information

Turbo Pump
ISO 100 – N/A
ISO 160 – 410600V0505
ISO 200 – N/A
ISO 250 – N/A
CF 100 – N/A
CF 160 – 410600V0506
CF 200 – N/A
CF 250 – N/A

Oerlikon-MAG-W-1300iP

MAG W 1300iP

Technical Specifications

Inlet Flange
ISO 200, CF 200
Pumping Speed, L/S (N):
1100
Pumping Speed, L/S (He):
1050
Pumping Speed, L/S (H):
1220
Compression Ratio (N):
> 10/8
Compression Ratio (He):
10/5
Compression Ratio (H):
10/3
Ultimate Pressure (mbar):
10 – 10
Startup Time (min):
7
Rotational Speed (rpm):
37,800
Orientation:
Any
Backing Pressure (mbar):
4
Outlet Flange:
NW 25
Weight (lb):
88
Price:
$28,500.00
Controller:
Integrated

Ordering Information

Turbo Pump
411300V0514
411300V0516

Oerlikon-MAG-W-1700iP

MAG W 1700iP

Technical Specifications

Inlet Flange
ISO 250, CF 250
Pumping Speed, L/S (N):
1610
Pumping Speed, L/S (He):
1660
Pumping Speed, L/S (H):
1710
Compression Ratio (N):
10/8
Compression Ratio (He):
10/5
Compression Ratio (H):
10/3
Ultimate Pressure (mbar):
10 – 10
Startup Time (min):
7
Rotational Speed (rpm):
33,000
Orientation:
Any
Backing Pressure (mbar):
4
Outlet Flange:
NW 40
Weight (lb):
99
Price:
$35,470.00
Controller:
Integrated

Ordering Information

Turbo Pump
411700V514
411700V516

Oerlikon-MAG-W-2200iP

MAG W 2200iP

Technical Specifications

Inlet Flange
ISO 250, CF 250
Pumping Speed, L/S (N):
2100
Pumping Speed, L/S (He):
2050
Pumping Speed, L/S (H):
170
Compression Ratio (N):
10/8
Compression Ratio (He):
10/4
Compression Ratio (H):
10/3
Ultimate Pressure (mbar):
10 – 10
Startup Time (min):
7
Rotational Speed (rpm):
30,600
Orientation:
Any
Backing Pressure (mbar):
2.5
Outlet Flange:
NW 40
Weight (lb):
110
Price:
$39,050.00
Controller:
Integrated

Ordering Information

Turbo Pump
412200V0514
412200V0516

Oerlikon-MAG-W-1300C

MAG W 1300C

Technical Specifications

Inlet Flange
ISO 200, CF 200, ISO 250
Pumping Speed, L/S (N):
1100
Pumping Speed, L/S (He):
1050
Pumping Speed, L/S (H):
920
Compression Ratio (N):
> 10/8
Compression Ratio (He):
N/A
Compression Ratio (H):
N/A
Ultimate Pressure (mbar):
10 – 10
Startup Time (min):
6
Rotational Speed (rpm):
36,000
Orientation:
Any
Backing Pressure (mbar):
2
Outlet Flange:
NW 40
Weight (lb):
70
Price:
$23,956.00
Controller:
Mag Drive Digital
Controller Price:
$11,000.00

Ordering Information

Turbo Pump
ISO 100 – N/A
ISO 160 – N/A
ISO 200 – 400110V0011
ISO 250 – 400110V0021
CF 100 – N/A
CF 160 – N/A
CF 200 – 400110V0051
CF 250 – N/A

Turbo Controller Mag Drive
400035V0011

Oerlikon-MAG-W-1500CT

MAG W 1500CT

Technical Specifications

Inlet Flange
ISO 200, CF 200, ISO 250
Pumping Speed, L/S (N):
1100
Pumping Speed, L/S (He):
1150
Pumping Speed, L/S (H):
920
Compression Ratio (N):
> 10/8
Compression Ratio (He):
N/A
Compression Ratio (H):
N/A
Ultimate Pressure (mbar):
10 – 10
Startup Time (min):
6
Rotational Speed (rpm):
36,000
Orientation:
Any
Backing Pressure (mbar):
2.6
Outlet Flange:
NW 40
Weight (lb):
70
Price:
$33,140.00
Controller:
Mag Drive Digital
Controller Price:
$11,000.00

Ordering Information

Turbo Pump
ISO 100 – N/A
ISO 160 – N/A
ISO 200 – 400026V0002
ISO 250 – 400027V0002
CF 100 – N/A
CF 160 – N/A
CF 200 – 400030V0002
CF 250 – N/A

Turbo Controller Mag Drive
400035V0011

Oerlikon-MAG-W-2000CT

MAG W 2000CT

Technical Specifications

Inlet Flange
ISO 250
Pumping Speed, L/S (N):
1650
Pumping Speed, L/S (He):
1800
Pumping Speed, L/S (H):
1720
Compression Ratio (N):
> 10/8
Compression Ratio (He):
N/A
Compression Ratio (H):
N/A
Ultimate Pressure (mbar):
10 – 8
Startup Time (min):
8
Rotational Speed (rpm):
28,800
Orientation:
Any
Backing Pressure (mbar):
3.5
Outlet Flange:
NW 40
Weight (lb):
137
Price:
$36,800.00
Controller:
Mag Drive Digital
Controller Price:
$11,000.00

Ordering Information

Turbo Pump
ISO 100 – N/A
ISO 160 – N/A
ISO 200 – N/A
ISO 250 – 400047V0002
CF 100 – N/A
CF 160 – N/A
CF 200 – N/A
CF 250 – N/A

Turbo Controller Mag Drive
400035V0011

Oerlikon-MAG-W-2200C

MAG W 2200C

Technical Specifications

Inlet Flange
ISO 200, CF 250, ISO 250
Pumping Speed, L/S (N):
2000
Pumping Speed, L/S (He):
1900
Pumping Speed, L/S (H):
1800
Compression Ratio (N):
> 10/5
Compression Ratio (He):
N/A
Compression Ratio (H):
N/A
Ultimate Pressure (mbar):
10 – 10
Startup Time (min):
10
Rotational Speed (rpm):
29,400
Orientation:
Any
Backing Pressure (mbar):
2
Outlet Flange:
NW 40
Weight (lb):
106
Price:
$38,200.00
Controller:
Mag Drive Digital
Controller Price:
$11,000.00

Ordering Information

Turbo Pump
ISO 100 – N/A
ISO 160 – N/A
ISO 200 – 400081V0011
ISO 250 – 400081V0021
CF 100 – N/A
CF 160 – N/A
CF 200 – N/A
CF 250 – 400081V0021

Turbo Controller Mag Drive
400035V0011

Oerlikon-MAG-W-2800C

MAG W 2800C

Technical Specifications

Inlet Flange
ISO 250, CF 250
Pumping Speed, L/S (N):
2650
Pumping Speed, L/S (He):
2450
Pumping Speed, L/S (H):
2100
Compression Ratio (N):
> 10/6
Compression Ratio (He):
N/A
Compression Ratio (H):
N/A
Ultimate Pressure (mbar):
10 – 10
Startup Time (min):
10
Rotational Speed (rpm):
28,800
Orientation:
Any
Backing Pressure (mbar):
2
Outlet Flange:
NW 40
Weight (lb):
141
Price:
$42,776.00
Controller:
Mag Drive Digital
Controller Price:
$11,000.00

Ordering Information

Turbo Pump
ISO 100 – N/A
ISO 160 – N/A
ISO 200 – N/A
ISO 250 – 400000V001
CF 100 – N/A
CF 160 – N/A
CF 200 – N/A
CF 250 – 400006V0021

Turbo Controller Mag Drive
400035V0011